SAN JOSE — Immersion lithography is supposed to be the savior for the semiconductor industry, but is the technology is all wet? While the lithography-tool vendors are hyping the technology, Intel Corp ...

China has quietly mandated that at least 50% of equipment used for new semiconductor capacity be domestically sourced.

SAN JOSE — Tool vendors don't see any technology roadblocks so far for immersion lithography, and expect to decide on the technology's feasibility by the end of the year or soon after. All three of ...

Demonstrating significant progress in all aspects of the technology, 193nm immersion lithography is on track for insertion into volume manufacturing, with good prospects for extendibility to ...

Nano-electronics research center imec and Cadence Design Systems have announced that the companies completed the first tapeout of a 5nm test chip using extreme ultraviolet (EUV) as... Burn J Lin, VP ...

New data on the properties of potential "liquid lenses" compiled by the National Institute of Standards and Technology (NIST) could help the semiconductor industry continue to shrink feature sizes on ...

Gigaphoton has released a 90W argon-fluoride excimer laser for use in next-generation semiconductor manufacturing. With a power output of 90 W and a repetition rate of 6000 Hz, the new ArF excimer ...

To make smaller transistors so chips can pack more gates and deliver higher performance, lithography must use shorter light wavelengths to form the smaller features. To that end, developments to ...

Thanks to a joint effort, an immersion lithography tool with an ultra-high numerical aperture (NA = 1.3) and 193-nm wavelength is on the horizon. Exitech's MS-193i microexposure device will help speed ...

Wuhan Hongxin Semiconductor Manufacturing (HSMC), a logic IC foundry founded in late 2017, is gearing up for 14nm and 7nm process manufacturing eyeing to be China's most advanced... After securing ...